Flexible Semiconductor Heater Options

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Heatron’s gas delivery, foreline, and exhaust heaters utilize an all silicone construction to ensure safety with UL 94V-0 or HB flame rating, and the  ¼” and ½” thick  silicone insulation make the heaters compatible with SEMI S2 safety specs.  

The assembly starts with a nichrome element heater, uniquely designed for your application, that is “formed” (molded) to the shape of the part to be heated to ensure optimum fit, ease of installation or removal, and maximize heat transfer giving you the temperature uniformity necessary to control condensation in your demanding application.  

The silicone sponge is a low density material that is designed to give you superior insulation and not be a source of particulate generation.   A silicone jacket is then added to keep the heater in place and give the assembly a clean, “finished” look.    To complete your unique heater we can add thermocouples, RTD’s, thermostats, and connectors to fit your application.  

We also offer etched foil polyimide heaters for the applications where low mass and even greater heat transfer is required.   Challenge us with your unique application.