Heatron|Semiconductor Flexible Heater Technology from Heatron

Heatron is a responsive, innovative and valued leader in the design, integration and production of heating systems for semiconductor equipment. 

• Responsive: fast turn-around on technical and operational issues
• Innovative: offering new and out-of-box solutions
• Valuable: reducing Total Cost by offering integrated products (part & heater assembled)

Our flexible heater product line features heaters for gas line, fore line and exhaust line applications from gas cabinets to scrubbers. All of these heating solutions are manufactured under an ISO 9001 registered quality system. Our quality, design flexibility, dedication to product innovation, and steadfast attention to customer needs have earned us a leadership position in the global market

• Gas Lines
• Forelines
• Chamber Components
• Vacuum System

Heatron's gas delivery, foreline, and exhaust heaters utilize an all silicone construction to ensure safety with UL 94V-0 or HB flame rating, and the  ¼" and ½" thick  silicone insulation make the heaters compatible with SEMI S2 safety specs.  

The assembly starts with a nichrome element heater, uniquely designed for your application, that is "formed" (molded) to the shape of the part to be heated to ensure optimum fit, ease of installation or removal, and maximize heat transfer giving you the temperature uniformity necessary to control condensation in your demanding application.  

The silicone sponge is a low density material that is designed to give you superior insulation and not be a source of particulate generation.   A silicone jacket is then added to keep the heater in place and give the assembly a clean, "finished" look.    To complete your unique heater we can add thermocouples, RTD's, thermostats, and connectors to fit your application.  

We also offer etched foil polyimide heaters for the applications where low mass and even greater heat transfer is required.   Challenge us with your unique application.

• Gas Lines
• Forelines
• Chamber Components
• Vacuum System

• Temperature:  -45C to 200C continuous
• Thickness:  0.030" +/- 0.002" is standard, (low mass means greater heat transfer)
• Voltages:  Maximum of 600V for UL recognized heaters
• Wattage:  Recommended maximum watt density of 5 watts/in² for wire wound heaters
• Sizes:  Minimum of ¼" diameter for gas delivery with many others available upon request, customized to fit your application.
• Leads: PTFE insulated wire is standard, with other options available
• Agency Approvals:  UL, CSA, TUV, CE Available on most configurations
• Sensor Options:  Overtemp thermostats are standard, with many other sensor options available.