APPLICATIONS

Semiconductor fabrication demands precision heating of gas delivery lines, fore lines, vacuum lines and valves to prevent deposition of impurities that can ruin a wafer. Heatron’s modular heaters are custom-fitted and interconnect to completely envelop gas delivery piping systems, ensuring a uniform temperature gradient and protection against particulate formation. Heatron has the right solutions for pump or gas line heating needs. From the gas cabinet to heated delivery lines, Heatron offers a complete line of heating solutions for semiconductor process equipment applications such as:

• Silicone Nitride
• Vacuum Lines
• Aluminum Etch
• Vacuum Chambers
• Tungsten Etch
• Gas Lines / Gas Panels
• CVD
• Exhaust and Forelines

LEARN MORE ABOUT OUR APPLICATIONS

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