INNOVATIVE HEATER DESIGN
Our flexible heaters include products for gas line, fore line and exhaust line applications from gas cabinets to scrubbers. The addition of high-tech silicone sponge insulators can create powerful custom heaters that deliver heat evenly to the most complex forms, eliminating cold spots that result in condensation or particle build-up. Heatron's insulated gas line heaters have an operating temperature range of 150°C to 200°C with a V0 flammability
rating, depending on material and configuration options. Silicone Rubber Foam is ideal for heater insulation on valves,
filters, mass flow controls and other components that have complex geometries. Formed Silicone Rubber is ideal for straight tees, elbows (including radius, butt-weld and flanged style), and less complex 3-D shapes in vacuum components. DuPont™ Kapton® Polyimide Film and All-Polyimide deliver more heat than conventional heaters with operating temperatures up to 260°C. All Heatron modular gas line heaters meet strict SEMI S2-93 safety requirements.
LOOKING FOR SOMETHING MORE ROBUST?
Thick Film heater technology creates new opportunities for semiconductor manufacturers as one of the most advanced heaters on the market. Heatron's Thick Film heaters are capable of reaching 1000°C, with minimal outgassing and precision performance control. Faster heat cycling makes thick film technology an excellent option for semiconductor manufacturing equipment. Ask us about Thick Film options for wafer-chuck heaters, burn-in-boards and other high-temperature applications.
DICING CAPABILITIES AND SERVICES FOR A THICK FILM
Heatron has diced our own thick film circuits for years. Put our saws to work for you. Our fleet of ADT 7200
series dicers can easily handle the accuracy your application requires.
• 200mm maximum diameter
• Silicon substrates
• Alumina (Al2O3) substrates
• Aluminum Nitride (AlN) substrates
• Other Ceramic substrates